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by James A. Cooper, Tsunenobu Kimoto
Fundamentals of Silicon Carbide Technology: Growth, Characterization, Devices and Applications
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Prev
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Title Page
Table of Contents
Cover
Title Page
Copyright
About the Authors
Preface
Chapter 1: Introduction
1.1 Progress in Electronics
1.2 Features and Brief History of Silicon Carbide
1.3 Outline of This Book
References
Chapter 2: Physical Properties of Silicon Carbide
2.1 Crystal Structure
2.2 Electrical and Optical Properties
2.3 Thermal and Mechanical Properties
2.4 Summary
References
Chapter 3: Bulk Growth of Silicon Carbide
3.1 Sublimation Growth
3.2 Polytype Control in Sublimation Growth
3.3 Defect Evolution and Reduction in Sublimation Growth
3.4 Doping Control in Sublimation Growth
3.5 High- Temperature Chemical Vapor Deposition
3.6 Solution Growth
3.7 3C-SiC Wafers Grown by Chemical Vapor Deposition
3.8 Wafering and Polishing
3.9 Summary
References
Chapter 4: Epitaxial Growth of Silicon Carbide
4.1 Fundamentals of SiC Homoepitaxy
4.2 Doping Control in SiC CVD
4.3 Defects in SiC Epitaxial Layers
4.4 Fast Homoepitaxy of SiC
4.5 SiC Homoepitaxy on Non-standard Planes
4.6 SiC Homoepitaxy by Other Techniques
4.7 Heteroepitaxy of 3C-SiC
4.8 Summary
References
Chapter 5: Characterization Techniques and Defects in Silicon Carbide
5.1 Characterization Techniques
5.2 Extended Defects in SiC
5.3 Point Defects in SiC
5.4 Summary
References
Chapter 6: Device Processing of Silicon Carbide
6.1 Ion Implantation
6.2 Etching
6.3 Oxidation and Oxide/SiC Interface Characteristics
6.4 Metallization
6.5 Summary
References
Chapter 7: Unipolar and Bipolar Power Diodes
7.1 Introduction to SiC Power Switching Devices
7.2 Schottky Barrier Diodes (SBDs)
7.3 pn and pin Junction Diodes
7.4 Junction-Barrier Schottky (JBS) and Merged pin-Schottky (MPS) Diodes
References
Chapter 8: Unipolar Power Switching Devices
8.1 Junction Field-Effect Transistors (JFETs)
8.2 Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs)
References
Chapter 9: Bipolar Power Switching Devices
9.1 Bipolar Junction Transistors (BJTs)
9.2 Insulated-Gate Bipolar Transistors (IGBTs)
9.3 Thyristors
References
Chapter 10: Optimization and Comparison of Power Devices
10.1 Blocking Voltage and Edge Terminations for SiC Power Devices
10.2 Optimum Design of Unipolar Drift Regions
10.3 Comparison of Device Performance
References
Chapter 11: Applications of Silicon Carbide Devices in Power Systems
11.1 Introduction to Power Electronic Systems
11.2 Basic Power Converter Circuits
11.3 Power Electronics for Motor Drives
11.4 Power Electronics for Renewable Energy
11.5 Power Electronics for Switch-Mode Power Supplies
11.6 Performance Comparison of SiC and Silicon Power Devices
References
Chapter 12: Specialized Silicon Carbide Devices and Applications
12.1 Microwave Devices
12.2 High-Temperature Integrated Circuits
12.3 Sensors
References
Appendix A: Incomplete Dopant Ionization in 4H-SiC
References
Appendix B: Properties of the Hyperbolic Functions
Appendix C: Major Physical Properties of Common SiC Polytypes
C.1 Properties
C.2 Temperature and/or Doping Dependence of Major Physical Properties
References
Index
End User License Agreement
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Guide
Cover
Table of Contents
Preface
Begin Reading
List of Illustrations
Figure 1.1
Figure 1.2
Figure 1.3
Figure 2.1
Figure 2.2
Figure 2.3
Figure 2.4
Figure 2.5
Figure 2.6
Figure 2.7
Figure 2.8
Figure 2.9
Figure 2.10
Figure 2.11
Figure 2.12
Figure 2.13
Figure 2.14
Figure 2.15
Figure 2.16
Figure 2.17
Figure 2.18
Figure 2.19
Figure 2.20
Figure 2.21
Figure 2.22
Figure 2.23
Figure 2.24
Figure 2.25
Figure 2.26
Figure 3.1
Figure 3.2
Figure 3.3
Figure 3.4
Figure 3.5
Figure 3.6
Figure 3.7
Figure 3.8
Figure 3.9
Figure 3.10
Figure 3.11
Figure 3.12
Figure 3.13
Figure 3.14
Figure 3.15
Figure 3.16
Figure 3.17
Figure 3.18
Figure 3.19
Figure 3.20
Figure 3.21
Figure 3.22
Figure 3.23
Figure 3.24
Figure 3.25
Figure 3.26
Figure 3.27
Figure 3.28
Figure 3.29
Figure 3.30
Figure 3.31
Figure 3.32
Figure 4.1
Figure 4.2
Figure 4.3
Figure 4.4
Figure 4.5
Figure 4.6
Figure 4.7
Figure 4.8
Figure 4.9
Figure 4.10
Figure 4.11
Figure 4.12
Figure 4.13
Figure 4.14
Figure 4.15
Figure 4.16
Figure 4.17
Figure 4.18
Figure 4.19
Figure 4.20
Figure 4.21
Figure 4.22
Figure 4.23
Figure 4.24
Figure 4.25
Figure 4.26
Figure 4.27
Figure 4.28
Figure 4.29
Figure 4.30
Figure 4.31
Figure 4.32
Figure 4.33
Figure 4.34
Figure 4.35
Figure 4.36
Figure 4.37
Figure 4.38
Figure 4.39
Figure 4.40
Figure 4.41
Figure 4.42
Figure 5.1
Figure 5.2
Figure 5.3
Figure 5.4
Figure 5.5
Figure 5.6
Figure 5.7
Figure 5.8
Figure 5.9
Figure 5.10
Figure 5.11
Figure 5.12
Figure 5.13
Figure 5.14
Figure 5.15
Figure 5.16
Figure 5.17
Figure 5.18
Figure 5.19
Figure 5.20
Figure 5.21
Figure 5.22
Figure 5.23
Figure 5.24
Figure 5.25
Figure 5.26
Figure 5.27
Figure 5.28
Figure 5.29
Figure 5.30
Figure 5.31
Figure 5.32
Figure 5.33
Figure 5.34
Figure 5.35
Figure 5.36
Figure 5.37
Figure 5.38
Figure 5.39
Figure 5.40
Figure 5.41
Figure 5.42
Figure 5.43
Figure 5.44
Figure 5.45
Figure 5.46
Figure 5.47
Figure 5.48
Figure 5.49
Figure 5.50
Figure 5.51
Figure 5.52
Figure 5.53
Figure 5.54
Figure 5.55
Figure 5.56
Figure 5.57
Figure 5.58
Figure 5.59
Figure 5.60
Figure 6.1
Figure 6.2
Figure 6.3
Figure 6.4
Figure 6.5
Figure 6.6
Figure 6.7
Figure 6.8
Figure 6.9
Figure 6.10
Figure 6.11
Figure 6.12
Figure 6.13
Figure 6.14
Figure 6.15
Figure 6.16
Figure 6.17
Figure 6.18
Figure 6.19
Figure 6.20
Figure 6.21
Figure 6.22
Figure 6.23
Figure 6.24
Figure 6.25
Figure 6.26
Figure 6.27
Figure 6.28
Figure 6.29
Figure 6.30
Figure 6.31
Figure 6.32
Figure 6.33
Figure 6.34
Figure 6.35
Figure 6.36
Figure 6.37
Figure 6.38
Figure 6.39
Figure 6.40
Figure 6.41
Figure 6.42
Figure 6.43
Figure 6.44
Figure 6.45
Figure 6.46
Figure 6.47
Figure 6.48
Figure 6.49
Figure 6.50
Figure 6.51
Figure 6.52
Figure 6.53
Figure 6.54
Figure 6.55
Figure 6.56
Figure 6.57
Figure 6.58
Figure 6.59
Figure 6.60
Figure 6.61
Figure 6.62
Figure 6.63
Figure 6.64
Figure 6.65
Figure 6.66
Figure 6.67
Figure 6.68
Figure 6.69
Figure 6.70
Figure 6.71
Figure 6.72
Figure 6.73
Figure 6.74
Figure 6.75
Figure 6.76
Figure 6.77
Figure 6.78
Figure 6.79
Figure 6.80
Figure 6.81
Figure 6.82
Figure 6.83
Figure 6.84
Figure 6.85
Figure 6.86
Figure 7.1
Figure 7.2
Figure 7.3
Figure 7.4
Figure 7.5
Figure 7.6
Figure 7.7
Figure 7.8
Figure 7.9
Figure 7.10
Figure 7.11
Figure 7.12
Figure 7.13
Figure 7.14
Figure 7.15
Figure 7.16
Figure 7.17
Figure 7.18
Figure 7.19
Figure 7.20
Figure 7.21
Figure 8.1
Figure 8.2
Figure 8.3
Figure 8.4
Figure 8.5
Figure 8.6
Figure 8.7
Figure 8.8
Figure 8.9
Figure 8.10
Figure 8.11
Figure 8.12
Figure 8.13
Figure 8.14
Figure 8.15
Figure 8.16
Figure 8.17
Figure 8.18
Figure 8.19
Figure 8.20
Figure 8.21
Figure 8.22
Figure 8.23
Figure 8.24
Figure 8.25
Figure 8.26
Figure 8.27
Figure 8.28
Figure 8.29
Figure 8.30
Figure 8.31
Figure 8.32
Figure 8.33
Figure 8.34
Figure 8.35
Figure 8.36
Figure 8.37
Figure 9.1
Figure 9.2
Figure 9.3
Figure 9.4
Figure 9.5
Figure 9.6
Figure 9.7
Figure 9.8
Figure 9.9
Figure 9.10
Figure 9.11
Figure 9.12
Figure 9.13
Figure 9.14
Figure 9.15
Figure 9.16
Figure 9.17
Figure 9.18
Figure 9.19
Figure 9.20
Figure 9.21
Figure 9.22
Figure 9.24
Figure 9.24
Figure 9.25
Figure 9.26
Figure 9.27
Figure 9.28
Figure 9.29
Figure 9.30
Figure 9.31
Figure 9.32
Figure 9.33
Figure 9.34
Figure 9.35
Figure 9.36
Figure 9.37
Figure 9.38
Figure 9.39
Figure 9.40
Figure 9.41
Figure 9.42
Figure 9.43
Figure 9.44
Figure 10.1
Figure 10.2
Figure 10.3
Figure 10.4
Figure 10.5
Figure 10.6
Figure 10.7
Figure 10.8
Figure 10.9
Figure 10.10
Figure 10.11
Figure 10.12
Figure 10.13
Figure 10.14
Figure 10.15
Figure 10.16
Figure 10.17
Figure 10.18
Figure 10.19
Figure 10.20
Figure 10.21
Figure 10.22
Figure 10.23
Figure 10.24
Figure 10.25
Figure 10.26
Figure 10.27
Figure 10.28
Figure 10.29
Figure 10.30
Figure 10.31
Figure 10.32
Figure 10.33
Figure 10.34
Figure 10.35
Figure 10.36
Figure 11.1
Figure 11.2
Figure 11.3
Figure 11.4
Figure 11.5
Figure 11.6
Figure 11.7
Figure 11.8
Figure 11.9
Figure 11.10
Figure 11.11
Figure 11.12
Figure 11.13
Figure 11.14
Figure 11.15
Figure 11.16
Figure 11.17
Figure 11.18
Figure 11.19
Figure 11.20
Figure 11.21
Figure 11.22
Figure 11.23
Figure 11.24
Figure 11.25
Figure 11.26
Figure 11.27
Figure 11.28
Figure 11.29
Figure 11.30
Figure 11.31
Figure 11.32
Figure 11.33
Figure 11.34
Figure 11.35
Figure 11.36
Figure 11.37
Figure 11.38
Figure 11.39
Figure 11.40
Figure 11.41
Figure 11.42
Figure 11.43
Figure 11.44
Figure 11.45
Figure 11.46
Figure 11.47
Figure 11.48
Figure 11.49
Figure 11.50
Figure 11.51
Figure 12.1
Figure 12.2
Figure 12.3
Figure 12.4
Figure 12.5
Figure 12.6
Figure 12.7
Figure 12.8
Figure 12.9
Figure 12.10
Figure 12.11
Figure 12.12
Figure 12.13
Figure 12.14
Figure 12.15
Figure 12.16
Figure 12.17
Figure 12.18
Figure 12.19
Figure 12.20
Figure 12.21
Figure A.1
Figure A.2
Figure A.3
Figure A.4
Figure A.5
Figure B.1
Figure B.2
List of Tables
Table 2.1
Table 2.2
Table 2.3
Table 2.4
Table 2.5
Table 2.6
Table 2.7
Table 3.1
Table 3.2
Table 3.3
Table 3.4
Table 4.1
Table 4.2
Table 4.3
Table 5.1
Table 5.2
Table 5.3
Table 5.4
Table 5.5
Table 5.6
Table 6.1
Table 6.2
Table 6.3
Table 6.4
Table 7.1
Table 8.1
Table 9.1
Table 11.1
Table 12.1
Table 12.2
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