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by Richard Leach
Fundamental Principles of Engineering Nanometrology, 2nd Edition
Cover image
Title page
Copyright
Acknowledgements
List of Figures
List of Tables
Chapter 1. Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology
1.1 What is engineering nanometrology?
1.2 The contents of this book and differences to edition 1
References
Chapter 2. Some Basics of Measurement
2.1 Introduction to measurement
2.2 Units of measurement and the SI
2.3 Length
2.4 Mass
2.5 Force
2.6 Angle
2.7 Traceability
2.8 Accuracy, precision, resolution, error and uncertainty
2.9 The laser
References
Chapter 3. Precision Measurement Instrumentation – Some Design Principles
3.1 Geometrical considerations
3.2 Kinematic design
3.3 Dynamics
3.4 The Abbe principle
3.5 Elastic compression
3.6 Force loops
3.7 Materials
3.8 Symmetry
3.9 Vibration isolation
References
Chapter 4. Length Traceability Using Interferometry
4.1 Traceability in length
4.2 Gauge blocks – both a practical and traceable artefact
4.3 Introduction to interferometry
4.4 Interferometer designs
4.5 Measurement of gauge blocks by interferometry
References
Chapter 5. Displacement Measurement
5.1 Introduction to displacement measurement
5.2 Basic terms
5.3 Displacement interferometry
5.4 Strain sensors
5.5 Capacitive displacement sensors
5.6 Eddy current and inductive displacement sensors
5.7 Optical encoders
5.8 Optical fibre sensors
5.9 Other optical displacement sensors
5.10 Calibration of displacement sensors
References
Chapter 6. Surface Topography Measurement Instrumentation
6.1 Introduction to surface topography measurement
6.2 Spatial wavelength ranges
6.3 Historical background of classical surface texture measuring instrumentation
6.4 Surface profile measurement
6.5 Areal surface texture measurement
6.6 Surface topography measuring instrumentation
6.7 Optical instruments
6.8 Capacitive instruments
6.9 Pneumatic instruments
6.10 Calibration of surface topography measuring instruments
6.11 Uncertainties in surface topography measurement
6.12 Metrological characteristics
6.13 Comparisons of surface topography measuring instruments
6.14 Determination of the spatial frequency response
6.15 Software measurement standards
References
Chapter 7. Scanning Probe and Particle Beam Microscopy
7.1 Scanning probe microscopy
7.2 Scanning tunnelling microscopy
7.3 Atomic force microscopy
7.4 Examples of physical properties measurement using AFM
7.5 Scanning probe microscopy of nanoparticles
7.6 Electron microscopy
7.7 Other particle beam microscopy techniques
References
Chapter 8. Surface Topography Characterisation
8.1 Introduction to surface topography characterisation
8.2 Surface profile characterisation
8.3 Areal surface texture characterisation
8.4 Fractal methods
8.5 Comparison of profile and areal characterisation
References
Chapter 9. Coordinate Metrology
9.1 Introduction to CMMs
9.2 Sources of error on CMMs
9.3 Traceability, calibration and performance verification of CMMs
9.4 Micro-CMMs
9.5 Micro-CMM probes
9.6 Verification and calibration of micro-CMMs
References
Chapter 10. Mass and Force Measurement
10.1 Traceability of traditional mass measurement
10.2 Low-mass measurement
10.3 Low-force measurement
References
Appendix A. SI Units of Measurement and Their Realisation at NPL
Appendix B. SI Derived Units
Examples of SI derived units expressed in terms of base units
SI derived units with special names and symbols
Index
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