- Cover image
- Title page
- Copyright
- Acknowledgements
- List of Figures
- List of Tables
- Chapter 1. Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology
- Chapter 2. Some Basics of Measurement
- Chapter 3. Precision Measurement Instrumentation – Some Design Principles
- Chapter 4. Length Traceability Using Interferometry
- Chapter 5. Displacement Measurement
- 5.1 Introduction to displacement measurement
- 5.2 Basic terms
- 5.3 Displacement interferometry
- 5.4 Strain sensors
- 5.5 Capacitive displacement sensors
- 5.6 Eddy current and inductive displacement sensors
- 5.7 Optical encoders
- 5.8 Optical fibre sensors
- 5.9 Other optical displacement sensors
- 5.10 Calibration of displacement sensors
- References
- Chapter 6. Surface Topography Measurement Instrumentation
- 6.1 Introduction to surface topography measurement
- 6.2 Spatial wavelength ranges
- 6.3 Historical background of classical surface texture measuring instrumentation
- 6.4 Surface profile measurement
- 6.5 Areal surface texture measurement
- 6.6 Surface topography measuring instrumentation
- 6.7 Optical instruments
- 6.8 Capacitive instruments
- 6.9 Pneumatic instruments
- 6.10 Calibration of surface topography measuring instruments
- 6.11 Uncertainties in surface topography measurement
- 6.12 Metrological characteristics
- 6.13 Comparisons of surface topography measuring instruments
- 6.14 Determination of the spatial frequency response
- 6.15 Software measurement standards
- References
- Chapter 7. Scanning Probe and Particle Beam Microscopy
- Chapter 8. Surface Topography Characterisation
- Chapter 9. Coordinate Metrology
- Chapter 10. Mass and Force Measurement
- Appendix A. SI Units of Measurement and Their Realisation at NPL
- Appendix B. SI Derived Units
- Index
Fundamental Principles of Engineering Nanometrology
Second Edition
Richard Leach
Micro & Nano Technologies Series
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