Table of Contents

Cover image

Title page

Related titles

Copyright

List of Contributors

1. What makes sensor devices and microsystems “intelligent” or “smart”?

1.1. Introduction

1.2. Interpretation of terms related to sensors

1.3. Key trends in the development of sensors (sensor devices) and microelectromechanical systems

1.4. Suggestions for improving terminology in the field of sensors and microelectromechanical systems

1.5. Conclusion

2. Interfacing sensors to microcontrollers: a direct approach

2.1. Introduction

2.2. Sensors

2.3. Microcontrollers

2.4. Interface circuits

2.5. Applications

2.6. Future trends

Sources of further information and advice

3. Smart temperature sensors and temperature sensor systems

3.1. Introduction

3.2. Measuring temperature, temperature differences, and temperature changes in industrial applications

3.3. Temperature-sensing elements

3.4. Basic concepts of smart temperature sensors

3.5. Methods to improve the accuracy of CMOS smart temperature-sensor systems

3.6. Principles of BJT-based smart temperature sensors with DCM

3.7. Signal processing of duty cycle modulated signals

3.8. Fabrication and test results

3.9. Summary

4. Capacitive sensors for displacement measurement in the subnanometer range

4.1. Introduction

4.2. Challenges for subnanometer displacement measurement with capacitive sensors

4.3. Offset capacitance cancellation technique

4.4. Capacitance-to-digital converter with offset capacitance cancellation and calibration functions

4.5. Conclusion

5. Integrated inductive displacement sensors for harsh industrial environments

5.1. Why inductive displacement sensors?

5.2. Principle of operation and practical limitations for eddy-current sensors

5.3. Design requirements in precision industrial applications

5.4. State-of-the-art eddy-current sensor interfaces

5.5. Eddy-current sensor interfaces with LC oscillator and ratiometric measurement

5.6. Summary and design perspectives

Appendix

6. Magnetic sensors and industrial sensing applications

6.1. Introduction

6.2. Conclusions

7. Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range

7.1. Introductory overview

7.2. Challenges for radiation detection in the VUV and EUV spectral ranges

7.3. Device solutions for radiation detection in the VUV and EUV spectral ranges

7.4. Methods of radiometric investigation and characterization

7.5. Spectral responsivity and radiation hardness of VUV and EUV radiation detectors

7.6. Future trends

8. Advanced interfaces for resistive sensors

8.1. Introduction

8.2. Resistive sensors

8.3. Voltamperometric resistance estimation

8.4. Resistance-to-time conversion methods

8.5. Industrial-related aspects

8.6. Conclusion and future trends

9. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications

9.1. Introduction

9.2. Fundamentals of ultrasonic sensing and pulse-echo measurements

9.3. Reconfigurable ultrasonic smart sensor platform design

9.4. Algorithms used in evaluation of reconfigurable ultrasonic smart sensor platform

9.5. Hardware realization of ultrasonic imaging algorithms using reconfigurable ultrasonic smart sensor platform

9.6. Future trends

9.7. Conclusion

9.8. Sources of further information and advice

10. Advanced Optical Incremental Sensors: Encoders and Interferometers

10.1. Introduction

10.2. Displacement interferometers

10.3. Sources of error and compensation methods

10.4. Optical encoders

10.5. Design considerations

10.6. Current and future trends

10.7. Conclusion

11. Microfabrication technologies used for creating smart devices for industrial applications

11.1. Introduction

11.2. Microelectromechanical systems design and modeling

11.3. Materials

11.4. Microfabrication processes

11.5. Simulation

11.6. Conclusion

12. Microactuators: Design and Technology

12.1. Introduction

12.2. Considerations in mechanisms selection

12.3. Electrostatic systems

12.4. Electrothermal systems

12.5. Piezoelectric systems

12.6. Conclusion

13. Microreaction chambers

13.1. Introduction

13.2. Basics of microfluidics

13.3. Components of a microfluidic system

13.4. Reaction chambers

13.5. Conclusions

14. Dynamic behavior of smart microelectromechanical systems in industrial applications

14.1. Introduction

14.2. Resonant frequency response of smart microelectromechanical systems vibrating structures

14.3. Quality factor and the loss coefficient of smart microelectromechanical systems vibrating structures

14.4. Industrial applications

15. Microelectromechanical systems integrating motion and displacement sensors

15.1. Introduction

15.2. Technical description of MEMS motion sensors: MEMS accelerometer

15.3. Microelectromechanical systems gyroscope

15.4. Microelectromechanical systems magnetometer

15.5. Conclusion and future trends

16. Microelectromechanical systems print heads for industrial printing

16.1. Introduction

16.2. Electrohydrodynamic print head droplet ejection

16.3. Electrohydrodynamic smart printing system

16.4. Case study: electrohydrodynamic printing applications

16.5. Conclusion

17. Photovoltaic and fuel cells in power microelectromechanical systems for smart energy management

17.1. Introduction

17.2. Photovoltaic mini-generators

17.3. Applications of photovoltaic mini-generators

17.4. Microfuel cells

17.5. Applications of microfuel cells

17.6. Smart energy management with sun sensors

17.7. Conclusion

18. RF-MEMS for smart communication systems and future 5G applications

18.1. Introduction

18.2. Evolution of RF-MEMS and of market expectations

18.3. RF-MEMS in the emerging 5G scenario

18.4. RF-MEMS technology: a general overview

18.5. RF-MEMS technology for capacitive microdevices

18.6. RF-MEMS technology for ohmic microdevices

18.7. RF-MEMS-based circuits for smart communication systems

18.8. RF-MEMS reliability

18.9. RF-MEMS power capability

18.10. Cointegration of RF-MEMS-based circuits with integrated circuits

18.11. Conclusions

19. Smart acoustic sensor array system for real-time sound processing applications

19.1. Introduction

19.2. Microelectromechanical systems microphones

19.3. Fundamentals of acoustic sensor arrays and applications

19.4. Design and implementation of smart acoustic microelectromechanical systems array

19.5. System implementation of AMA and CAPTAN

19.6. Smart acoustic sensor array system operation

19.7. Smart acoustic sensor array system calibration

19.8. Sensor array for time-of-flight measurements

19.9. 3D sound source localization

19.10. Smart acoustic sensor array system for mapping of the heart sound

19.11. Conclusion

Index

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