- Cover image
- Title page
- Table of Contents
- Related titles
- Copyright
- List of Contributors
- 1. What makes sensor devices and microsystems “intelligent” or “smart”?
- 2. Interfacing sensors to microcontrollers: a direct approach
- 3. Smart temperature sensors and temperature sensor systems
- 3.1. Introduction
- 3.2. Measuring temperature, temperature differences, and temperature changes in industrial applications
- 3.3. Temperature-sensing elements
- 3.4. Basic concepts of smart temperature sensors
- 3.5. Methods to improve the accuracy of CMOS smart temperature-sensor systems
- 3.6. Principles of BJT-based smart temperature sensors with DCM
- 3.7. Signal processing of duty cycle modulated signals
- 3.8. Fabrication and test results
- 3.9. Summary
- 4. Capacitive sensors for displacement measurement in the subnanometer range
- 5. Integrated inductive displacement sensors for harsh industrial environments
- 5.1. Why inductive displacement sensors?
- 5.2. Principle of operation and practical limitations for eddy-current sensors
- 5.3. Design requirements in precision industrial applications
- 5.4. State-of-the-art eddy-current sensor interfaces
- 5.5. Eddy-current sensor interfaces with LC oscillator and ratiometric measurement
- 5.6. Summary and design perspectives
- Appendix
- 6. Magnetic sensors and industrial sensing applications
- 7. Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range
- 7.1. Introductory overview
- 7.2. Challenges for radiation detection in the VUV and EUV spectral ranges
- 7.3. Device solutions for radiation detection in the VUV and EUV spectral ranges
- 7.4. Methods of radiometric investigation and characterization
- 7.5. Spectral responsivity and radiation hardness of VUV and EUV radiation detectors
- 7.6. Future trends
- 8. Advanced interfaces for resistive sensors
- 9. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications
- 9.1. Introduction
- 9.2. Fundamentals of ultrasonic sensing and pulse-echo measurements
- 9.3. Reconfigurable ultrasonic smart sensor platform design
- 9.4. Algorithms used in evaluation of reconfigurable ultrasonic smart sensor platform
- 9.5. Hardware realization of ultrasonic imaging algorithms using reconfigurable ultrasonic smart sensor platform
- 9.6. Future trends
- 9.7. Conclusion
- 9.8. Sources of further information and advice
- 10. Advanced Optical Incremental Sensors: Encoders and Interferometers
- 11. Microfabrication technologies used for creating smart devices for industrial applications
- 12. Microactuators: Design and Technology
- 13. Microreaction chambers
- 14. Dynamic behavior of smart microelectromechanical systems in industrial applications
- 15. Microelectromechanical systems integrating motion and displacement sensors
- 16. Microelectromechanical systems print heads for industrial printing
- 17. Photovoltaic and fuel cells in power microelectromechanical systems for smart energy management
- 18. RF-MEMS for smart communication systems and future 5G applications
- 18.1. Introduction
- 18.2. Evolution of RF-MEMS and of market expectations
- 18.3. RF-MEMS in the emerging 5G scenario
- 18.4. RF-MEMS technology: a general overview
- 18.5. RF-MEMS technology for capacitive microdevices
- 18.6. RF-MEMS technology for ohmic microdevices
- 18.7. RF-MEMS-based circuits for smart communication systems
- 18.8. RF-MEMS reliability
- 18.9. RF-MEMS power capability
- 18.10. Cointegration of RF-MEMS-based circuits with integrated circuits
- 18.11. Conclusions
- 19. Smart acoustic sensor array system for real-time sound processing applications
- 19.1. Introduction
- 19.2. Microelectromechanical systems microphones
- 19.3. Fundamentals of acoustic sensor arrays and applications
- 19.4. Design and implementation of smart acoustic microelectromechanical systems array
- 19.5. System implementation of AMA and CAPTAN
- 19.6. Smart acoustic sensor array system operation
- 19.7. Smart acoustic sensor array system calibration
- 19.8. Sensor array for time-of-flight measurements
- 19.9. 3D sound source localization
- 19.10. Smart acoustic sensor array system for mapping of the heart sound
- 19.11. Conclusion
- Index
Smart Sensors and MEMS
Intelligent Sensing Devices and Microsystems for Industrial Applications
Second Edition
Editors
Stoyan Nihtianov
Antonio Luque
-
No Comment
..................Content has been hidden....................
You can't read the all page of ebook, please click here login for view all page.