Appendix

Physical Constants in SI

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A.1 Ionization potentials

Xenon12.13 eV
Helium24.59 eV
Argon15.76 eV
Nitrogen14.53 eV

A.2 Work function

MaterialWork Function (eV)
Al4.25
C4.7
Cu4.4
Mo4.3
Ni4.5
W4.54
LaB62.3–2.4

A.3 Ion-induced secondary emission coefficients [1]

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A.3.1 Glow discharge

A.3.1.1 Normal cathode fall in various gases

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A.3.1.2 A, B coefficients in equation for breakdown voltage image

AB
Air14.6365
Ar13.6235
H25130
H2O12.9289
He2.834

A.4 Vacuum arcs

Table A.1

Ion velocity, Average Ion Charge and Erosion Rate

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A.5 Arc burning voltage

Cathode MaterialArc Burning Voltage, V
Ti21.3
Cu23.4
Mo29.3
Ni20.5

A.6 Sputtering yield (xenon ions) [7]

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A.7 Cross sections for helium and nitrogen [8,9]

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Rate coefficients are in [m3/s] unless noted otherwise. Te is electron temperature in [eV], T is the neutral temperature in [K].

Full summary of reaction rates for helium/oxygen plasma can be found in Ref. [10].

A compilation of mathematical and scientific formulas, physical parameters pertinent to a variety of plasma regimes, ranging from laboratory devices to astrophysical objects, can be found in NRL Plasma Formulary [11]. This booklet has been the mini-Bible of plasma physicists for the past 25 years.

References

1. Ohya K, Ishitani T. Target material dependence of secondary electron images induced by focused ion beams. Surf Coatings Technol. 2002;158–159:8–13.

2. Brown IG. Vacuum arc ion sources. Rev Sci Instrum. 1994;65:3061.

3. Yushkov G, Anders A, Oks E, Brown IG. Ion velocities in vacuum arc plasmas. J Appl Phys. 2000;88:5618.

4. Kutzner J, Miller HC. Integrated ion flux emitted from the cathode spot region of a diffuse vacuum arc. J Phys D Appl Phys. 1992;25:686–693.

5. Kimblin CW. J Appl Phys. 1973;44:3074.

6. Brown IG, Shiraishi H. Cathode erosion rates in vacuum-arc discharges. IEEE Trans Plasma Sci. 1990;18:170.

7. A.P. Yalin, B. Rubin, S.R. Domingue, Z. Glueckert, J.D. Williams, Differential sputter yields of boron nitride, quartz, and Kapton due to low energy Xe+ bombardment, in: 43rd AIAA Joint Propulsion Conference, Cincinnati, OH, AIAA paper 2007–5314, 2007.

8. Hagelaar GJM, Pitchford LC. Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models. Plasma Sources Sci Technol. 2005;14:722.

9. Golubovskii YB, Maiorov VA, Behnke J, Behnke JF. Modelling of the homogeneous barrier discharge in helium at atmospheric pressure. J Phys D. 2003;36:39.

10. Park G, Lee H, Kim G, Lee JK. Global model of He/O2 and Ar/O2 atmospheric pressure glow discharges. Plasma Processes Polym. 2008;5:569–576.

11. NRL Plasma Formulary. Naval Research Laboratory, Washington, DC. <http://wwwppd.nrl.navy.mil/nrlformulary/>, 2011.

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