Book Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
• Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
• Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
• Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
• Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
• Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Table of Contents
- Cover image
- Title page
- Table of Contents
- Micro & Nano Technologies Series
- Copyright
- Preface
- Author Biography
- Chapter 1. Introduction
- 1.1 Philosophy of Micro/Nanofabrication
- 1.2 The Industry–Science Dualism
- 1.3 Industrial Applications
- 1.4 Purpose and Organization of this Book
- REFERENCES
- Chapter 2. Basic Technologies for Microsystems
- 2.1 Photolithography
- 2.2 Thin Films
- 2.3 Silicon Micromachining
- 2.4 Industrially Established Non-Silicon Processing
- 2.5 Conclusions
- REFERENCES
- Chapter 3. Advanced Microfabrication Methods
- 3.1 LIGA
- 3.2 Deep Reactive Ion Etching
- 3.3 Micro-Ceramic Processing
- 3.4 Speciality Substrates
- 3.5 Advanced Non-Silicon and Silicon Hybrid Devices
- 3.6 Planar Lightwave Circuits
- 3.7 Fabrication Example of an Integrated Optical Device
- 3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study
- 3.9 Conclusions
- REFERENCES
- Chapter 4. Nanotechnology
- 4.1 Top-Down, Bottom-Up
- 4.2 Nanomaterials
- 4.3 Where Are We?
- 4.4 Where to Go from Here?
- REFERENCES
- Chapter 5. Micromechanical Transducers
- 5.1 Application Fields
- 5.2 Overview of Materials
- 5.3 Thick and Thin Film Hybrid Materials
- 5.4 Microactuation
- 5.5 Packaged Sensors
- 5.6 Silicon as a Mechanical Material in Resonant Microdevices
- 5.7 Information Society
- 5.8 Conclusions
- REFERENCES
- Chapter 6. Chemical and Biological Sensors at Component and Device Level
- 6.1 Application Field
- 6.2 Sensor Principles for the Collection of (Bio)Chemical Information
- 6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
- 6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
- 6.5 Conclusions
- REFERENCES
- Chapter 7. Microfluidic Components, Devices and Integrated Lab-on-a-Chip Systems
- 7.1 Application Fields
- 7.2 Microfluidic Components
- 7.3 Controlled Transport by Diffusion
- 7.4 Integration for Microfluidic Transport, Sensing and Dispensing
- 7.5 Lab-on-a-Chip
- 7.6 Device-to-World Connections: The MATAS Concept
- 7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis
- 7.8 Conclusions
- REFERENCES
- Chapter 8. Microfabrication for Novel Products in Drug Delivery: An Example
- 8.1 Microneedle Research at University of Twente and its Spin-Off
- 8.2 MNA-4-Insulin: A Brief Evaluation
- 8.3 Conclusions
- REFERENCES
- Chapter 9. Reflective Comments and Conclusions
- 9.1 Environmental Aspects
- 9.2 Health Aspects of Nanoparticles
- 9.3 Conclusions
- REFERENCES
- Index