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Handbook of Silicon Based MEMS Materials and Technologies
Author Teruaki Motooka , Ari Lehto , Markku Tilli , Veikko Lindroos
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:Silicon as MEMS materialMaterial properties and measurement techniquesAna....
Release Date 2010/01